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OUR CERTIFICATION METHODICS
Standard measuring Zygo methodologies of surface figure tolerance for ON axis optics.
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Industrial grade high power interferometer ZYGOVeriFire (AMETEK):
www.zygo.com/?/met/interferometers/
Key parameters:
RMS: Simple Repeatability < 0.06 nm, λ /10’000 (2σ);
RMS: Wavefront Repeatability < 0.35 nm, λ /1’800(mean+2σ)
Peak Pixel Deviation < 0.50 nm, λ /1’200 (99.5th%)
RMS: Wavefront measurement tolerance 6.2 nm, λ /100
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For other types of optics You can find standard Zygo methodologies at Zygo official web www.zygo.com
Standard measuring methodologies of surface figure tolerance for OFF axis optics.
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Principle Interferometric inspection scheme
for OFF Axis optics.
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Industrial grade high power
interferometer ZYGOVeriFire (AMETEK):
www.zygo.com/?/met/interferometers/
Key parameters:
RMS: Simple Repeatability <0.06 nm, λ/10’000 (2σ);
RMS: Wavefront Repeatability <0.35 nm, λ/1’800(mean+2σ)
Peak Pixel Deviation < 0.50 nm, λ /1’200 (99.5th%)
RMS: Wavefront measurement tolerance 6.2 nm, λ/100
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Interferometric Wave front test
Off Axis real Parabolic Mirror: Dia100 mm;·
RMS λ/100@633 nm; 10/5 s/d @ 1”;
HR & Laser line & High LIDT
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Our unique INTERFEROMETRIC setup (“know-how”) for certification of precision mirrors at work AOI
(very important for customer setups with grazing angles schemes, here add information about this phenomenon)
Inspection SCHEMES to test CONCAVE mirrors (incl. ‘Focal Length’ measurements)
Focal spot analyze.
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Focal spot of mirror # 20190630-Ellipse C1
Tests at 80º AOI; f=1200 mm; f’=1801 mm;
Scale: 1pixel=(5.5 x5.5) µm; Focal spot Dia: 11.2 µm.
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Analyses of Focal spot, mirror #20190526-Ellipse
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Zemax: Toroids theory, Ray tracing Image
Focal Spot Tor #19: Ø 1% ≈300 µm
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Measuring of Roughness of TOROIDAL MIRROR # 20190609 at 0° AOI Rq = 0.157nm
www.taylor-hobson.com/non-contact-profilers.html
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